Stage Heaters (Semiconductor Process Components)
|
PRODUCT NAME
|
Stage Heaters (Semiconductor Process Components)
|
|---|---|
|
PRODUCT CATEGORY
|
Semiconductor Process Parts
|
|
INDUSTRY/SITUATION OF USE
|
Information and Communication Related / Semiconductor Manufacturing Equipment
|
|
FUNCTIONS
|
Heating
|
|
OUTLINE
|
Stage heaters contribute to high-precision temperature control in deposition equipment for semiconductor manufacturing.
|
|
CHARACTERISTICS
|
Small-diameter metal-sheathed heater elements are built in by bonding to achieve highly flexible temperature control and layout to suit the intended use. Stage heaters can be used for any purpose, from setting of multiple zones, temperature control, and isothermal holding of each zone, to temperature gradient control.
|