Stage Heaters (Semiconductor Process Components)
Stage heaters contribute to high-precision temperature control in deposition equipment for semiconductor manufacturing.
Cooling Plates (Semiconductor Process Components)
These cooling plates are intended for electrostatic chucks mainly used in the etching process of semiconductor manufacturing. They control the temperature of semiconductor substrates with high precision.
Shower Heads (Semiconductor Process Components)
Shower heads supply process gases onto semiconductor substrates in processes such as film deposition and etching in semiconductor manufacturing.